New Facing Targets Sputtering System
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Product Information
Product Information | Box-shaped Source | Rotary Substrate | Stationary Substrate | In-line Substrate | Web-coater
Rotary Substrate type NFTS
Rotary substrate type NFTS
Rotary substrate type equipment is suitable for basic research. This type of equipment can be attached to several small type NFTS plasma sources on a sidewall of the vacuum chamber. Moreover this type can be equipped with several substrate holders in the vacuum chamber. These substrate holders move in front of a plasma source. Thus, this model is able to prepare several samples at a vacuum process and multilayer samples at in situ process using different plasma sources that have different target materials.