XY Manipulator TM Series
These XY Manipulators are applicable for the precision movement or positioning of the sample in various UHV conditioned chambers from outside the vacuum. Two axial movements are available as standard and 3, 4 or 5 axial movements can also be achieved by combination with various optional kits.
Features
- Compatible to UHV conditions below 10-8 Pa (10-10 Torr) operating pressure
- Smooth and high-precision positioning available without breaking the vacuum by the use of flexible and reliable edge welded bellows.
- Compact and light construction.
- "+T" type is equipped with a tilt motion attachment (7°)
- Many options available, please see MR series rotary motion drives.