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New Facing Targets Sputtering System - NFTS300-A

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Overview

NFTS system

NFTS300-A System

The FTS Multilayer Deposition System is used to create the multilayer surface of Neutron Super Mirrors. The system is equipped with two DC Facing Targets and two DC Magnetron Cathodes and also one Ion Beam for polishing in the deposition chamber. It uses Facing Targets Sputtering Cathodes developed by FTS Corporation - more information can be found on their website www.ftsc.co.jp/cn12/English-index.html

This instrument can perform high precision multilayer deposition on substrates with arbitrary shapes using the five axis attitude control system. Substrates with a maximum diameter of 300mm can be handled in this system. It has a load lock system with which you can introduce substrates keeping the deposition chamber in high vacuum.


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