New Facing Targets Sputtering System
Overview | Features | Principle | Applications | Product Information
Product Information
Product Information | Box-shaped Source | Rotary Substrate | Stationary Substrate | In-line Substrate | Web-coater
In-line substrate type NFTS
In-line substrate type NFTS
Middle sized plasma source
In line type NFTS equipment is widely used from basic research to mass production processes. This type of equipment prepares thin films on substrates using a tray type conveyor. This system consists of several NFTS plasma sources arranged in series with the conveyor direction on a vacuum chamber. Therefore this type is able to prepare multilayered thin films at an in situ process using different plasma sources that have different target materials.