New Facing Targets Sputtering System
Overview | Features | Principle | Applications | Product Information
Product Information
Product Information | Box-shaped Source | Rotary Substrate | Stationary Substrate | In-line Substrate | Web-coater
Product Information
NFTS equipment mainly consists of plasma sources, a vacuum chamber, substrate conveyance mechanics and vacuum pumps. These components of NFTS equipment are specially designed to work together in a system. NFTS plasma sources have a box shaped structure connected with the vacuum chamber. This plasma source structure makes it possible to design more flexible equipment and a more compact vacuum chamber.
NFTS equipment system is roughly classified into 4 types according to its substrate conveyance mechanics.
- Rotary Substrate Type NFTS
- Stationary Substrate Type NFTS
- In-line Substrate Type NFTS
- Web-coater Type NFTS
All NFTS equipment is designed to respond to a variety of customer needs from the basic research stage to the mass-production stage.