Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS

FILMER - high resolution surface analysis and microscopy system

FIB-TOF-SIMS

Simultaneous SEM observation can be performed on the same field of view of the FIB, which makes it possible to obtain SIMS data with minimum damage.
Seamless operation from cutting to analysis is easily performed with Windows based control software.
PC-controlled five-axis UHV manipulator makes the process and analysis flexible.
Low energy electron beam gun for charge compensation.
Spatial resolution: <40nm
Cooling and heating ranges from -120°C to 900°C
Extension port for an additional ion gun (ICF114)
Optional: Laser post ionisation (SNMS)
The most modern and sophisticated FIB made by A&D is applied.

FIB-TOF-SIMS in use