Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS
FILMER - high resolution surface analysis and microscopy system
Features | Specification | Photos | Data1 | Data2 | Example1 | Example2 | Example3
Specification
Primary ion source | Ga+, 30keV | |
SIMS mapping lateral resolution | 60nm | |
SIM observational lateral resolution | 20nm | |
SEM observational lateral resolution | 20nm | |
Viewing range (SIMS, SIM, SEM) | 1µm ~ 500µm | |
Ultimate vacuum pressure | 3x10-8 Pa | |
Sample size | < φ15mm | |
Stage Stroke | X, Y, Z | ±5mm |
Tilt | ±45° | |
Rotation | ±180° |
- Capability of etching
- Neutralising electrification
- Baking
- Interlock
- Control software
(Windows XP) - Data viewer software
(Windows XP) - ICF114 port for optional ion gun