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Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS

FILMER - high resolution surface analysis and microscopy system

Features | Specification | Photos | Data1 | Data2 | Example1 | Example2 | Example3

Specification

Primary ion sourceGa+, 30keV
SIMS mapping lateral resolution60nm
SIM observational lateral resolution20nm
SEM observational lateral resolution20nm
Viewing range (SIMS, SIM, SEM)1µm ~ 500µm
Ultimate vacuum pressure3x10-8 Pa
Sample size< φ15mm
Stage StrokeX, Y, Z±5mm
Tilt±45°
Rotation±180°
Diagram

FIB-TOF-SIMS

 

 


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