Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS
FILMER - high resolution surface analysis and microscopy system
Features | Specification | Photos | Data1 | Data2 | Example1 | Example2 | Example3
Specification
| Primary ion source | Ga+, 30keV | |
| SIMS mapping lateral resolution | 60nm | |
| SIM observational lateral resolution | 20nm | |
| SEM observational lateral resolution | 20nm | |
| Viewing range (SIMS, SIM, SEM) | 1µm ~ 500µm | |
| Ultimate vacuum pressure | 3x10-8 Pa | |
| Sample size | < φ15mm | |
| Stage Stroke | X, Y, Z | ±5mm |
| Tilt | ±45° | |
| Rotation | ±180° | |
FIB-TOF-SIMS
- Capability of etching
- Neutralising electrification
- Baking
- Interlock
- Control software
(Windows XP) - Data viewer software
(Windows XP) - ICF114 port for optional ion gun