Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS
FILMER - high resolution surface analysis and microscopy system
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TOF-SIMS elemental maps of a D-RAM cross-section (field of view: 2x2 μm2), and an intensity line profile along the solid line in 27Al+ map. by T. SAKAMOTO presented at “the 16th International Conference on Secondary Ion Mass Spectrometry, SIMS XVI in 2007”