Toyama logo

Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS

FILMER - high resolution surface analysis and microscopy system

Features | Specification | Photos | Data1 | Data2 | Example1 | Example2 | Example3

Elemental maps

TOF-SIMS elemental maps of a D-RAM cross-section (field of view: 2x2 μm2), and an intensity line profile along the solid line in 27Al+ map. by T. SAKAMOTO presented at “the 16th International Conference on Secondary Ion Mass Spectrometry, SIMS XVI in 2007”

Particle

High resolution SIMS images of a small particle after FIB cross-sectioning.

IC cross section

IC cross section SIM image

IC cross section

Elemental maps of IC cross section


© 2011-2017 Toyama|Sitemap|Privacy Japanese|Back to top|Print this page