High Heat Load - XY Alignment Stage
Features | Specification | Drawing | Data
Specification
| Type I OTA-00173-A | Type II OTA-00174-A | ||
|---|---|---|---|
| Travel Length (mm) | X | 50 | 60 |
| Y | 20 | 30 | |
| Motor type | X | VEXTA 5-phase stepping motor: PK 569 H-B (driver and controller are not included) | |
| Y | |||
| Home Position Sensor | X | Magnet switch: SONY SET - K2 | |
| Y | |||
| Position read-out | X | Omron rotary encoder: E6B2-CWZ1X (P/R 2000) covered by radiation box | |
| Y | |||
| Resolution (mm/step) | X | 0.002 | 0.002 |
| Y | 0.0005 | 0.0005 | |
| Repeatability (mm) | X | ±0.0005 | ±0.001 |
| Y | ±0.001 | ±0.001 | |
| Backrush (mm) | X | 0.002 | 0.002 |
| Y | 0.002 | 0.002 | |
| Pitching, yawing (arcsec) (reproducibility) | X | 14 | 5 |
| Y | 14 | 5 | |
| Straightness (mm) | X | 0.002 | 0.001 |
| Y | 0.002 | 0.001 | |
| Maximum Load (kg) | X | 80 | 80 |
| Y | 80 | 80 | |