High Heat Load - XY Alignment Stage
Features | Specification | Drawing | Data
Features
X-Y Alignment Stage
This ultra-precise alignment stage is used for the alignment of heavy front end components such as beam absorbers and masks. Both horizontal (X axis) and vertical (Y axis) movement is driven by stepper motors.
The precise positioning, even under heavy load, is achieved by the combination of high stiffness guide rails and high torque stepper motors. The design is compact using a wedge shaped stage which saves vertical space.