Total Reflection X-ray focusing mirror drive FMP-1000A series
Features | Design | Configuration | Specification | Data | Delivery Record
Basic Configuration
1. Mirror holders ( a pair of mirror holders, water-cooled mask *, indirect water cooling mechanism *)
2. Mirror Bender (bowstring for mirror bending, bent-adjustment drive, position measuring device)
3. Mirror positioning Stages (base plate, 4-axes stages (X1, X2, Z1, Z2))
4. Vacuum chamber (vacuum chamber, main flange, service ports)
5. Supporting Frames (supporting frame for mirror positioning stages, supporting frame for vacuum chamber)
6. Control System (stepping motor drivers and controller, control software*, display for position measuring device)
7. Vacuum pumping system* (pumps, gauges, valves etc.)
8. Optical element* (mirror itself)
Note: * is optional
