XYZ Manipulator TMZ Series
Specifications
| Format | TMZ-50 | TMZ-50+T | TMZ-150 | TMZ-150+T |
|---|---|---|---|---|
| Pressure Range | <1.3x10-11 Pa m3/sec (1x10-10 Torr L/sec) |
|||
| Vacuum sealing method | Bellows type | |||
| Allowable heating temperature | 200 °C | |||
| X,Y axis parallel distance | Both X,Y axis ± 12.5mm | |||
| Z axis travel | 50mm | 150mm | ||
| Repeat accuracy | X,Y,Z axis all <0.01mm | |||
| Tilt feature | No | Yes 7° | No | Yes 4.5° |
| Flange | ICF152FH**/ICF070FT** | |||
| Introduction port | ICF034FT x 5 | |||
| Weight (g) | 9.5 | 10.5 | 10.5 | 11.5 |
* Other non-standard types can be supplied on request
** "FH" means a drilled hole type ICF flange and "FT" means a tapped hole type ICF flange.
