XY Manipulator TM Series
Specifications
| Format | TM-125 | TM-125+T | |||||
|---|---|---|---|---|---|---|---|
| Pressure Range | <1.3x10-11 Pa m³/sec (1x10-10 Torr L/sec) |
||||||
| Vacuum sealing method | Bellows type | ||||||
| Allowable heating temperature | 150 °C | ||||||
| Travel distance | Both X,Y axis ± 12.5mm | ||||||
| Repeat accuracy | Both X,Y <0.01mm | ||||||
| Tilt feature | No | Yes 7° | |||||
| Flange | ICF070FT** | ||||||
| Weight (g) | 4.1Kg | 5.1Kg | |||||
* Other non-standard types can be supplied on request
** "FT" means a tapped hole type ICF flange
