X-ray Lithography System - Indus-100D
Overview | Features | Design | Control system | Scanning stage | Photos | Alignment
Control System
The control electronics interface with a computer system which automates the irradiation procedure and monitors signals and interlocks of the beamline system and X-ray scanner during the process.
The control software is coded using the libraries of LabVIEW. This allows the possibility of extensions or modifications to be made by the user.
The snapshots below show some of the computer screens for the main control modes.
Exposure Control Mode
Motor Control Mode
Exposure Status Mode