Ellipsometer
Features | Specification | Internal Mechanisms | Drawing | Measurement Modes | Accuracy | Data
Accuracy Data
Accuracy measurements in the case of micro-step scanning
| Axis | Resolution (deg/pulse) | Accuracy (deg) | Reproducibility (deg) | Backlash (deg) | |||
|---|---|---|---|---|---|---|---|
| Full step | Micro step | CW | CCW | CW | CCW | ||
| Χ | 0.005 | 0.005 | 0.0015 | 0.0014 | 0.0007 | 0.0005 | 0.0015 |
| θp-A | 0.072 | 0.0072 | 0.0062 | 0.0058 | 0.0019 | 0.0013 | 0.015 |
| θp | 0.072 | 0.0072 | 0.0058 | 0.0078 | 0.0004 | 0.0009 | 0.019 |
| Ψ | 0.144 | 0.036 | 0.02 | 0.018 | 0.0013 | 0.0013 | 0.047 |
| θA | 0.18 | 0.0045 | 0.056 | 0.045 | 0.0045 | 0.0037 | 0.19 |
| θA-D | 0.36 | 0.009 | 0.029 | 0.035 | 0.0083 | 0.0032 | 0.20 |
