Ellipsometer
Features | Specification | Internal Mechanisms | Drawing | Measurement Modes | Accuracy | Data
Specification
- Pressure achievable: UHV <10-6 Pa
- Bakeable temperature: 150°C
- Energy range examples:
Photon Energy (eV) Polariser (Reflection) Phase Shifter (Transmission) 97 Mo/Si Mo/Si 280 Cr/Sc, Cr/C Cr/Sc, Cr/C 400 Cr/Sr Cr/Sc 575 Cr/Sc, W/B4C Cr/Sc - Polariser (P) 10x20mm, Analyser (A) 10x10mm
- Five sets of UHV compatible 5-phase stepping motors used to drive the goniometer.
- Driving range of axes:
** Scan resolution is the accuracy measurement value in the case of micro-step scanning.Axis Driving Range (deg) Resolution (deg)** Χ 0~370 <0.005 θ-A -50~90 <0.02 θp 0~60 <0.02 Ψ 0~370 <0.05 θA 0~70 <0.2 θA - D(2θA) 0~140 <0.2